کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
8150786 1524426 2014 28 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Homoepitaxial HVPE-GaN growth on non-polar and semi-polar seeds
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
Homoepitaxial HVPE-GaN growth on non-polar and semi-polar seeds
چکیده انگلیسی
In this work homoepitaxial HVPE-GaN growth on non-polar and semi-polar GaN seeds was described. Two crystallization processes, in the same experimental conditions but using different carrier gases: N2 and H2, were performed. An influence of growth directions and growth conditions on the growth rate and properties (morphology, structural quality and oxygen and silicon contaminations) of obtained crystals were investigated and discussed. It was shown that the growth rate strongly depends on the growth direction and the carrier gas. It was demonstrated that for the semi-polar [20-21] direction it was possible to obtain high quality and highly conductive (without intentional doping) gallium nitride layers.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 403, 1 October 2014, Pages 48-54
نویسندگان
, , , , , , , , , ,