کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8152179 | 1524449 | 2013 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Low temperature growth of GaAs1âyBiy epitaxial layers
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کلمات کلیدی
A1. High resolution X-ray diffraction - A1 پراش اشعه ایکس با وضوح بالاA3. Metalorganic vapor phase epitaxy - A3 اپیتاکسی فاز بخار فلزیB1. Bismuth compounds - B1 ترکیبات بیسموتB2. Semiconducting gallium arsenide - B2 آرسنید گالیوم نیمه هادیB2. Semiconducting ternary compounds - B2 ترکیبیات ترمیمی نیمه هادیB2. Semiconducting III–V materials - B2 مواد نیمه هادی III-V
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
A comparative study is presented of the effect of reactant sequencing during the metalorganic vapor phase epitaxy of GaAs1âyBiy on epilayer composition and structural properties. The simultaneous introduction of precursors was compared with a pulsed or alternating reactant flow. Pulsed growth resulted in a more controlled incorporation of Bi into the GaAs epitaxial layers and led to a more well-defined superlattice structure as determined by X-ray diffraction. The effect of growth temperature (370-420 °C) and precursors flow rate on the film properties and Bi incorporation was determined. While growth rate of GaAs decreased with decreasing growth temperature, the GaAs1âyBiy growth rate was almost temperature insensitive over this investigated temperature range. The catalytic effect of Bi metal or the trimethyl bismuth reactant on the decomposition and incorporation of Ga is considered to rationalize this observed behavior. The specific choice of reactant flow and temperature can strongly influence the material properties of the GaAs1âyBiy films. These observations suggest the possibility of the growth of GaAs1âyBiy hetero-structures at the temperatures below what was assumed to be the lowest possible temperature for the growth of GaAs.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 380, 1 October 2013, Pages 23-27
Journal: Journal of Crystal Growth - Volume 380, 1 October 2013, Pages 23-27
نویسندگان
Kamran Forghani, Amita Anand, Luke J. Mawst, Thomas F. Kuech,