کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9670409 | 1450402 | 2005 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of submicron- or nano-sized mesa electrodes via AFM oxidation: Applications to metal ion detection
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Fabrication of submicron- or nano-sized mesa electrodes via AFM oxidation: Applications to metal ion detection Fabrication of submicron- or nano-sized mesa electrodes via AFM oxidation: Applications to metal ion detection](/preview/png/9670409.png)
چکیده انگلیسی
Conductive probe AFM local oxidation is a promising lithographic technique for use in fabricating submicron- or nano-scale structures. In this study, a metal ion detector with a submicron size electrode was fabricated by AFM lithography using a pre-programmed voltage and a non-etching method. The square frame of the mesa pattern was functionalized by APTES for the metal ion detection, and the remaining portion was used as an electrode by the self-assembly of MPTMS for Au metal deposition. In this module, no metal lining or lead line was required, because the conductive tip (mobile electrode) was in direct contact with the gold-deposited mesa portion (fixed electrode). The conductance changed with the quantity of adsorbed copper ions, due to electron tunneling between the mobile and surface electrodes.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 81, Issues 2â4, August 2005, Pages 341-348
Journal: Microelectronic Engineering - Volume 81, Issues 2â4, August 2005, Pages 341-348
نویسندگان
Younghun Kim, Inhee Choi, Sung Koo Kang, Kyunghee Choi, Jongheop Yi,