Topside release of atomic force microscopy probes with molded diamond tips

Atomic force microscopy (AFM) probes with highly doped molded diamond tips have proven to increase the resolution of scanning spreading resistance microscopy (SSRM) measurements. There is consequently a need for probes with consistent characteristics. AFM probes with molded tips require the attachment of a holder piece for their manipulation. Because of the size of this holder piece, the probes are typically released from the backside of the substrate. We propose a novel approach that combines the advantages of topside release with a release after attachment of the holder piece. In this approach, the contact area between the holder piece and the substrate is reduced to a few bonding pads. The release chemical can then flow under the holder piece in between the pads. Since only the pads need to be underetched, the release time is greatly reduced.