کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9670645 1450405 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Simultaneous suppression of overlap errors and side-lobes in attenuated PSM lithography by rule-based OPC
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Simultaneous suppression of overlap errors and side-lobes in attenuated PSM lithography by rule-based OPC
چکیده انگلیسی
Problems of overlap errors and side-lobe printing by the design rule reduction in the lithography process using attenuated phase-shifting masks (attPSM) have been serious. Overlap errors and side-lobes can be simultaneously solved by the rule-based correction using scattering bars with the rules extracted from test patterns. Process parameters affecting the attPSM lithography simulation have been determined by the fitting method to the process data. Overlap errors have been solved applying the correction rules to the metal patterns overlapped with contact/via. Moreover, the optimal insertion rule of the scattering bars has made it possible to suppress the side-lobes and to get additional pattern fidelity at the same time.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 77, Issues 3–4, April 2005, Pages 217-222
نویسندگان
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