کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9829286 | 1524487 | 2005 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Improvement in the crystalline quality of homoepitaxial diamond films by oxygen plasma etching of mirror-polished diamond substrates
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Improvement in the crystalline quality of homoepitaxial diamond films by oxygen plasma etching of mirror-polished diamond substrates Improvement in the crystalline quality of homoepitaxial diamond films by oxygen plasma etching of mirror-polished diamond substrates](/preview/png/9829286.png)
چکیده انگلیسی
We have investigated the effect of crystalline defects existing in mirror-polished single-crystalline diamond substrates on the electronic quality of diamond films homoepitaxially grown on them. High-pressure/high-temperature-synthesized diamond substrates were exposed to quasi-electron-cyclotron-resonance (quasi-ECR) oxygen plasma to etch the substrate surface layers â1 μm in thickness, where a substantial amount of polishing-process-induced crystalline defects were supposed to remain. Defects other than these were also expected to be etched out during the oxygen quasi-ECR process. Homoepitaxial diamond films were subsequently grown on them using a high-power microwave-plasma chemical-vapor-deposition (MPCVD) method. The crystalline quality of the grown films was characterized electronically using cathodoluminescence measurements. The results clearly verify that the proposed etching process for mirror-polished diamond substrates can effectively suppress defect formation in the MPCVD diamond films homoepitaxially grown on them.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 285, Issues 1â2, 15 November 2005, Pages 130-136
Journal: Journal of Crystal Growth - Volume 285, Issues 1â2, 15 November 2005, Pages 130-136
نویسندگان
Michinori Yamamoto, Tokuyuki Teraji, Toshimichi Ito,