کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9829315 1524488 2005 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Growth and characterization of cubic InxGa1−xN epilayers on two different types of substrate
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
Growth and characterization of cubic InxGa1−xN epilayers on two different types of substrate
چکیده انگلیسی
We report on the growth and characterization of cubic InGaN epilayers on two different types of substrates: GaAs (0 0 1) and 3C-SiC (0 0 1). The films are grown by RF plasma-assisted molecular beam epitaxy (MBE). The crystalline quality and state of stress in these films were assessed by performing Raman scattering and X-ray diffraction experiments. Both types of measurements complement one another as techniques to determine crystalline quality and the state of biaxial strain present in the alloy layers. Our experiments show that, for the same In molar fraction, samples deposited on SiC substrates are more uniformly strained and have better crystallinity than those deposited on GaAs substrates.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 284, Issues 3–4, 1 November 2005, Pages 379-387
نویسندگان
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