کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9829506 | 1524493 | 2005 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Temperature dependence of threading dislocation density in In0.2Ga0.8As layers grown on GaAs substrates by metalorganic-vapor phase epitaxy
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Temperature dependence of threading dislocation density in In0.2Ga0.8As layers grown on GaAs substrates by metalorganic-vapor phase epitaxy Temperature dependence of threading dislocation density in In0.2Ga0.8As layers grown on GaAs substrates by metalorganic-vapor phase epitaxy](/preview/png/9829506.png)
چکیده انگلیسی
In0.2Ga0.8As layers were grown on GaAs substrates with graded buffer layers by metalorganic vapor phase epitaxy at 370-630 °C. Good surface morphology with a crosshatch pattern (CHP) was obtained at 600 and 630 °C. Transmission electron microscopy (TEM) observation confirmed that the cap layers had a threading dislocation density of between 1.3 and 2.0Ã106 cmâ2. At 500 °C, a layer showed a rough surface morphology. Phase separation was revealed by TEM. The threading dislocation density was over 1Ã107 cmâ2 at 500 °C. Good surface morphology with a CHP was obtained at 430, 450 and 480 °C. A layer grown at 430 °C showed the lowest threading dislocation density of 2.5Ã105 cmâ2. Low temperature growth was effective for lowering the threading dislocation density in the cap layers.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 282, Issues 1â2, 15 August 2005, Pages 36-44
Journal: Journal of Crystal Growth - Volume 282, Issues 1â2, 15 August 2005, Pages 36-44
نویسندگان
Y. Takano, K. Kobayashi, S. Shirakata, M. Umezawa, S. Fuke,