
HVPE growth of AlxGa1−xN ternary alloy using AlCl3 and GaCl
Keywords: B2 ترکیبیات ترمیمی نیمه هادی; 61.10.Nz; 61:66.Dk; 81.05.Ea; 81.15.KkA1. Crystal structure; A3. Hydride vapor phase epitaxy; B1. Alloys; B1. Nitrides; B2. Semiconducting ternary compounds