Keywords: Passivation; Sputtering; Cat-CVD; ITO; Silicon heterojunction solar cells;
مقالات ISI (ترجمه نشده)
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Keywords: Alumina film; Alloy catalyzer; Decomposition of TMA; Cat-CVD; Hot-wire CVD; Al2O3; Passivation film; Barrier film
Keywords: Heterojunction solar cell; Ultra-thin SiOx layer; Cat-CVD; Passivation; Epitaxial growth
Suppression of the epitaxial growth of Si films in Si heterojunction solar cells by the formation of ultra-thin oxide layers
Keywords: Cat-CVD; Passivation; Heterojunction solar cell; Ultra-thin SiOx layer; Epitaxial growth
Low surface recombination velocity in n-Si passivated by catalytic-chemical vapor deposited alumina films
Keywords: Solar cells; Passivation films; Alumina films; Hot-Wire CVD; Cat-CVD; Surface recombination velocity; Al2O3;
Reduction of surface recombination velocity by rapid thermal annealing of p-Si passivated by catalytic-chemical vapor deposited alumina films
Keywords: Surface recombination velocity; Alumina passivation film; Solar cell; Cat-CVD; HW-CVD; Rapid thermal annealing
Low temperature boron doping into crystalline silicon by boron-containing species generated in Cat-CVD apparatus
Keywords: Cat-CVD; Cat-doping; Radical doping; Low temperature doping
White bright luminescence at room temperature from TEOS-based thin films via catalytic chemical vapor deposition
Keywords: TEOS; Cat-CVD; Photoluminescence; nc-Si; Carbon bonding;
Transparent and super-hydrophobic properties of PTFE films coated on glass substrate using RF-magnetron sputtering and Cat-CVD methods
Keywords: PTFE; Cat-CVD; RF-magnetron sputtering; Super-hydrophobic
Passivation characteristics of SiNx/a-Si and SiNx/Si-rich-SiNx stacked layers on crystalline silicon
Keywords: Si-rich silicon nitride; Amorphous silicon; Solar cell efficiency; Cat-CVD; Passivation; Surface recombination velocity
Size modulation of nanocrystalline silicon embedded in amorphous silicon oxide by Cat-CVD
Keywords: Nanocrystalline-silicon; Cat-CVD; X-ray-diffraction; Micro-Raman
Silicon nanorods prepared by glancing angle catalytic chemical vapor deposition
Keywords: Silicon nanorods; Cat-CVD; GLAD; Crystallization
New application of Cat-CVD technology and recent status of industrial implementation
Keywords: Cat-CVD; Industrial implementation
Frontiers in HWCVD
Keywords: Hot Wire CVD; Cat-CVD; i-CVD; Thin films; Semiconductors; Nanostructures; Polymers; Devices
Recent situation of industrial implementation of Cat-CVD technology in Japan
Keywords: Cat-CVD; Hot-wire CVD; Industrialization; Cat-CVD apparatus; Device application
ULVAC research and development of Cat-CVD applications
Keywords: Cat-CVD; Hot-Wire CVD; Silicon nitride; Radical; Solar cell;
Estimation of moisture barrier ability of thin SiNx single layer on polymer substrates prepared by Cat-CVD method
Keywords: Gas barrier film; Cat-CVD
Cat-CVD SiN passivation films for OLEDs and packaging
Keywords: Cat-CVD; Passivation; Barrier film; Roll to roll; Silicon nitride; Organic light-emitting diode; Water vapor transmission rate; Ca corrosion test
Application of Cat-CVD for ULSI technology
Keywords: Cat-CVD; SiN; LSI; NBTI; Hydrogen radical; Ash; ELK;
Hot filament-dissociation of (CH3)3SiH and (CH3)4Si, probed by vacuum ultra violet laser time of flight mass spectroscopy
Keywords: VUV time of flight mass spectroscopy; Catalytic-dissociation; Photofragmentation and photoionization; Activation energies; Molecular (CH3)SiH and (CH3)4Si; Cat-CVD;
Expectation for Cat-CVD in ULSI technology and business trend
Keywords: LSI; Cat-CVD; Silicon nitride; Ashing
Cat-CVD-prepared oxygen-rich μc-Si:H for wide-bandgap material
Keywords: Microcrystalline; Amorphous silicon oxide; Cat-CVD; Wide bandgap;