کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1673711 1008952 2009 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
New application of Cat-CVD technology and recent status of industrial implementation
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
New application of Cat-CVD technology and recent status of industrial implementation
چکیده انگلیسی

Recent progress in application of Cat-CVD (Hot Wire CVD) technology is overviewed, along with recent status of industrial implementation of this technology. Although the use of Cat-CVD technology in factories has not been open to the public, the technology appears to fit for the fabrication of ultra-high frequency devices of compound semiconductors, compound semiconductor lasers, solar cells, and formation of coating films for other devices. The issues for practical use of this technology are also discussed, together with promising future of this Cat-CVD technology.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 517, Issue 12, 30 April 2009, Pages 3420–3423
نویسندگان
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