کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1673782 | 1008953 | 2008 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Recent situation of industrial implementation of Cat-CVD technology in Japan
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Efforts of industrial application of Cat-CVD technology are surveyed. Recent movement of industrial implementation is also reviewed by showing examples in Japanese industry. Cat-CVD technology is originally developed as a new tool for fabricating semiconductor devices, however, recently, use of the technology is attempted in various fields such as chemical, mechanical and bio-technical engineering. It is shown that Cat-CVD has high feasibility as a fundamental technology of modern industries.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 516, Issue 5, 15 January 2008, Pages 537–540
Journal: Thin Solid Films - Volume 516, Issue 5, 15 January 2008, Pages 537–540
نویسندگان
Hideki Matsumura, Keisuke Ohdaira,