PECVD of carbon by inverted fireballs: From sputtering, bias enhanced nucleation to deposition
Keywords: اشعه ماوراء بنفش اشعه ایکس; PECVD; plasma enhanced chemical vapor deposition; SEM; scanning electron microscope; EDX; energy dispersive X-ray spectroscopy; XRD; X-ray diffraction; XPS; X-ray photoemission spectroscopy; BEN; bias enhanced nucleation; ND; nano-diamond; UNCD; ultra-nan