کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10642402 997656 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
GaN nanocolumns formed by inductively coupled plasmas etching
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
GaN nanocolumns formed by inductively coupled plasmas etching
چکیده انگلیسی
GaN nanocolumns were formed by inductively coupled plasma (ICP) etching. It was found that tops of these nanocolumns were hexagonal with the c-axis perpendicular to substrate surface. It was also found that density of the GaN nanocolumns depends strongly on etching parameters which suggests that the formation of these GaN nanocolumns was not related to the dislocation density in the original GaN epitaxial layers. Furthermore, it was found that we can reduce the dimension and increase the density of the GaN nanocolumns by decreasing the bias power during ICP etching.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Physica E: Low-dimensional Systems and Nanostructures - Volume 28, Issue 2, July 2005, Pages 115-120
نویسندگان
, , , , , ,