Catalytic growth of boron nitride nanotubes using gas precursors

Hexagonal boron nitride nanotubes (BNNTs) are synthesized at low substrate temperatures on nickel (Ni)- or cobalt (Co)-coated oxidized Si (1 1 1) wafers in a microwave plasma-enhanced chemical vapor deposition (MPCVD) system by decomposition and reaction of gas mixtures consisting of B2H6–NH3–H2. The growth of one-dimensional (1-D) BN nanostructures is obtained at an optimum combination of catalyst film thickness, substrate temperature, and precursor gas flow rates. The morphology, composition and structural properties of the BNNTs are analyzed by scanning electron microscope (SEM), transmission electron microscope (TEM), energy dispersive X-ray spectroscopy (EDX), selected area diffraction (SAD), and Raman spectroscopy. The patterned growth of BNNTs is also demonstrated.