کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1546557 | 997618 | 2008 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Hydrofluoric acid free synthesis of macropores on silicon by chemical vapor deposition and their photoluminescence
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Hydrofluoric acid free synthesis of macropores on silicon by chemical vapor deposition and their photoluminescence Hydrofluoric acid free synthesis of macropores on silicon by chemical vapor deposition and their photoluminescence](/preview/png/1546557.png)
چکیده انگلیسی
A novel hydrofluoric acid (HF) free atmospheric pressure chemical vapor deposition (APCVD) method has been developed to synthesize macropores on silicon. Field emission scanning electron microscopy (FESEM), X-ray powder diffraction (XRD) and energy-dispersive X-ray (EDX) spectrum indicate that the composition of macropores with the diameters of several hundred nanometers is silica. Moreover, the mechanism of the formation of the macropores has been preliminarily discussed. The photoluminescence (PL) spectrum of the macropores shows a broad violet emission band with the peak position at 402Â nm, which is related with the defects of silica.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Physica E: Low-dimensional Systems and Nanostructures - Volume 40, Issue 3, January 2008, Pages 494-498
Journal: Physica E: Low-dimensional Systems and Nanostructures - Volume 40, Issue 3, January 2008, Pages 494-498
نویسندگان
Zhihong Liu, Hui Zhang, Lei Wang, Dongsheng Li, Deren Yang,