کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1546557 997618 2008 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Hydrofluoric acid free synthesis of macropores on silicon by chemical vapor deposition and their photoluminescence
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد مواد الکترونیکی، نوری و مغناطیسی
پیش نمایش صفحه اول مقاله
Hydrofluoric acid free synthesis of macropores on silicon by chemical vapor deposition and their photoluminescence
چکیده انگلیسی
A novel hydrofluoric acid (HF) free atmospheric pressure chemical vapor deposition (APCVD) method has been developed to synthesize macropores on silicon. Field emission scanning electron microscopy (FESEM), X-ray powder diffraction (XRD) and energy-dispersive X-ray (EDX) spectrum indicate that the composition of macropores with the diameters of several hundred nanometers is silica. Moreover, the mechanism of the formation of the macropores has been preliminarily discussed. The photoluminescence (PL) spectrum of the macropores shows a broad violet emission band with the peak position at 402 nm, which is related with the defects of silica.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Physica E: Low-dimensional Systems and Nanostructures - Volume 40, Issue 3, January 2008, Pages 494-498
نویسندگان
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