Nanomechanical and boundary lubrication properties of titanium carbide and diamond-like carbon nanoperiod multilayer and nanocomposite films

► More than 12-nm-target-period films have comparable multilayer structure. ► Under the 6-nm-target-period, nanocomposite structures were observed. ► 12-Nm-target-period film shows high hardness and nanowear resistance. ► Superior boundary lubrication can be obtained for (TiC/DLC)n films. ► 12-Nm-target-period film shows a low friction and a small damage.