کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1790517 | 1524438 | 2014 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Growth rate for the selective epitaxial growth of III-V compounds inside submicron shallow-trench-isolation trenches on Si (001) substrates by MOVPE: Modeling and experiments
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Growth rate for the selective epitaxial growth of III-V compounds inside submicron shallow-trench-isolation trenches on Si (001) substrates by MOVPE: Modeling and experiments Growth rate for the selective epitaxial growth of III-V compounds inside submicron shallow-trench-isolation trenches on Si (001) substrates by MOVPE: Modeling and experiments](/preview/png/1790517.png)
چکیده انگلیسی
A mathematical model was developed to examine the growth rate of III-V compounds inside sub-micron trenches by MOVPE. Based on this model, we theoretically analyzed the possible dependence of the growth rate on the trench width primarily from two aspects, i.e. Knudson diffusion and enhanced equilibrium vapor pressure due to the shrinking trench size. Then, associated with the experimental data from the growth of both InAlAs and InAs, we found that the average growth rate inside submicron trenches is primarily influenced by trench diffusion type under typical growth conditions.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 391, 1 April 2014, Pages 59-63
Journal: Journal of Crystal Growth - Volume 391, 1 April 2014, Pages 59-63
نویسندگان
S. Jiang, C. Merckling, W. Guo, N. Waldron, M. Caymax, W. Vandervorst, M. Seefeldt, M. Heyns,