کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1791282 1524467 2013 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Analysis of W-shape melt/crystal interface formation in Czochralski silicon crystal growth
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
Analysis of W-shape melt/crystal interface formation in Czochralski silicon crystal growth
چکیده انگلیسی

The shape of the melt/crystal interface in Czochralski grown silicon crystal is a result of the interaction of several phenomena. In particular, melt convection plays a key role as it affects the heat and mass transfer inside the melt. Depending on the growth conditions and heat transfer in the melt, the interface shape can evolve from a purely concave or convex shape to a W-shape. The aim of this study is to explore the heat transfer conditions and melt flow patterns leading to the formation of W-shape interfaces. The 2D simulations are performed for 6 in. diameter silicon in order to identify conditions leading to W-shape formation. The numerical results show that the formation and development of W-shape interfaces is associated with growth conditions favoring the appearance of a vortex underneath the crystal. This vortex significantly influences the thermal field within the crystallization zone and locally alters the interface deflection. This study suggests that the formation of the W-shape interfaces influences significantly the grown-in defects and crystal quality.


► Formation of W-shape interfaces during Cz-silicon crystal growth is studied.
► 2D simulations are performed adopting a quasi-steady state approximation.
► A small vortex appears below the crystal above a certain rotation rate.
► Stresses are found smaller at the crystal side boundary for W-shape cases.
► W-shape interface affects the distribution of grown-in defects of the crystal.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 362, 1 January 2013, Pages 77–82
نویسندگان
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