کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1793563 | 1023679 | 2009 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Synthesis and structural characterization of highly ã1Â 0Â 0ã-oriented {1Â 0Â 0}-faceted nanocrystalline diamond films by microwave plasma chemical vapor deposition
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Synthesis and structural characterization of highly ã1Â 0Â 0ã-oriented {1Â 0Â 0}-faceted nanocrystalline diamond films by microwave plasma chemical vapor deposition Synthesis and structural characterization of highly ã1Â 0Â 0ã-oriented {1Â 0Â 0}-faceted nanocrystalline diamond films by microwave plasma chemical vapor deposition](/preview/png/1793563.png)
چکیده انگلیسی
We report the synthesis and characterization of high-quality highly ã1 0 0ã oriented nanocrystalline diamond (NCD) films consisting of {1 0 0} nano-facets with a high growth rate of 2.6 μm/h. The NCD samples were grown on large (1 0 0) silicon wafers of 5.08 cm in diameter by employing CH4/H2/O2/N2 chemistries without the aid of bias for orientation, microwave power 3 kW and the substrate temperature about 700 °C using a 5 kW-type high-power microwave plasma chemical vapor deposition (CVD) system. The strong ã1 0 0ã preferred orientation is unambiguously demonstrated by a detailed crystallographic texture analysis and the conventional X-ray diffraction. Moreover, a detailed morphological characterization by the high-resolution scanning electron microscopy (SEM) and the atomic force microscopy (AFM), reveal that the growth surface consists of square (1 0 0) facets with an average size of about 60 nm and has a cylindrical microstructure. We demonstrate that the root-mean-square surface roughness as low as â¼15 nm, measured by AFM on 1 μm2 scan areas, can be obtained even for considerably thick (76 μm) films. The high quality of these films is confirmed by the Raman and Fourier-transformer infrared spectra. The high-quality smooth ã1 0 0ã-oriented {1 0 0}-faceted NCD films may have high potential in mechanical, tribological and micro-electromechanical system (MEMS) applications.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 311, Issue 8, 1 April 2009, Pages 2258-2264
Journal: Journal of Crystal Growth - Volume 311, Issue 8, 1 April 2009, Pages 2258-2264
نویسندگان
C.J. Tang, S.M.S. Pereira, A.J.S. Fernandes, A.J. Neves, J. Grácio, I.K. Bdikin, M.R. Soares, L.S. Fu, L.P. Gu, A.L. Kholkin, M.C. Carmo,