کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
539400 | 1450358 | 2014 | 4 صفحه PDF | دانلود رایگان |
• Analytical expressions of the Talbot effect for self-imaging from low-order diffraction rays were derived.
• The depth of focus based on Rayleigh’s criterion was analytically a quarter of the Talbot distance.
• In a hexagonal array of a fine pitch, the Talbot distance derived from 2nd-order approximation was not accurate. The Talbot distance of hexagonal array was derived from the accurate analytical expression.
The Talbot effect is a self-imaging phenomenon enabling lens-less imaging. The interval of the focus position is called the Talbot distance. To maintain pattern fidelity, the accurate focus position of the self-imaging needs to be known. The depth of focus based on Rayleigh’s criterion is analytically a quarter of the Talbot distance. In a hexagonal array of a fine pitch, the Talbot distance derived from 2nd-order approximation is inaccurate. The analytically accurate expression of the Talbot distance for hexagonal arrays is shown in imaging of low-order diffraction rays.
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Journal: Microelectronic Engineering - Volume 123, 1 July 2014, Pages 80–83