Development of electrochemical biosensors by e-beam lithography for medical diagnostics

In this work the fabrication and characterization of boron-doped diamond (BDD) nanoelectrode arrays are discussed. The use of boron-doped diamond electrodes is very attractive due to advantageous properties including high reproducibility, stability, and robustness under extreme conditions, where conventional electrode materials may undergo severe erosion. BDD electrodes have also proved to be very useful because they show an extremely wide potential window in aqueous solutions without oxidation of the electrode itself. This allows electrochemical detection, at tiny background currents, of a number of substances that oxidize at very positive potentials, where other electrodic materials are not suitable. BDD based NEAs were prepared using Si 〈1 0 0〉 substrates coated with a layer of Boron doped diamond as macroelectrode. NEAs were obtained by creating an array of nanoholes by electron beam lithography (EBL) in a thin film of polycarbonate deposited on top of the macroelectrode. This approach leads to the formation of recessed nanoelectrodes. The parameters for using polycarbonate as a novel electron beam resist have been optimized and successfully used for fabrication of NEAs. The most interesting properties of this polymer for nanofabrication purposes are the high lithographic contrast, which allows the creation of structures of dimensions less than 100 nm; chemical stability, which guarantees a long-term use in electrochemical solutions and the possibility of functionalization with biological molecules (DNA and proteins). NEAs have been characterized with cyclic voltammetry and have provided voltammetric signals controlled by pure radial diffusion. The low background current of BDD added to the properties of NEAs indicate that this system can be applied for the development of sensors with high sensitivity. Polycarbonate surface of NEAs was successfully functionalized with small ss-DNA sequence, confirming the possibility of exploiting these systems as diagnostic biosensors.

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► Nanoelectrode arrays were obtained by e-beam lithography.
► Polycarbonate was used as positive resist and boron doped diamond as substrate.
► Electrochemical behavior of nanoelectrode arrays was tested by cyclic voltammetry.
► Small sequence of ss-DNA were immobilized on nanoelectrode array surface.