کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
542016 1450324 2016 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Interface traps in Al/HfO2/SiO2/4H-SiC metal-insulator-semiconductor (MIS) structures studied by the thermally-stimulated current (TSC) technique
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Interface traps in Al/HfO2/SiO2/4H-SiC metal-insulator-semiconductor (MIS) structures studied by the thermally-stimulated current (TSC) technique
چکیده انگلیسی


• Thermally stimulated current (TSC) measurement of the HfO2/SiO2/SiC MOS structure
• Methodology of the TSC analysis is discussed for wide-bandgap semiconductors and double dielectrics.
• Analysis of thermally stimulated current line-shape is not useful for complex MOS structure on wide-bandgap semiconductors.
• The trap profile is discussed taking into account SiO2/SiC and SiO2/HfO2 interfaces.

Thermally-stimulated current (TSC) is presented as a powerful technique for investigation of shallow interface traps in metal-insulator-semiconductor (MIS) structures fabricated on wide bandgap semiconductors. This work highlighted often made mistakes during the characterization of MIS structures with this technique which was originally used for the characterization of the structures on silicon. Accuracy of the results can be significantly improved by the implementation of the proposed methods of analysis.

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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 157, 1 May 2016, Pages 46–51
نویسندگان
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