Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

This study presents the micromachining of CuInxGa(1−x)Se2-based (CIGS) solar photovoltaic (PV) modules using an infrared (IR) ultrafast laser ablation setup, which is composed of a femtosecond laser source, galvano-mirror scanner and high-precision motor driven stages. Herein the three thin films (including back contact, absorber and front contact layers) of CIGS PV modules are used a one-time scribing technique. In this work, we propose to use the integrated laser system with a high repetition rate (100 kHz) and an optimized energy density (fluence) threshold to achieve precise machining quality and acceptable throughput for the process of CIGS PV modules.

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► Three thin films of CIGS PV modules can be fabricated by one-time scribing technique of ultrafast laser irradiation.
► No melting exists on the scribing edges after ultrafast laser micromachining.
► The results reveal this process removal of ZnO, CIGS, and Mo layer without residuals.
► Ultrafast laser scribing process of CIGS PV modules can achieve good quality.