کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
544595 871770 2011 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
GeTe phase change material and Ti based electrode: Study of thermal stability and adhesion
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
GeTe phase change material and Ti based electrode: Study of thermal stability and adhesion
چکیده انگلیسی

Phase change memories use a specific phase change material (PCMat) as a resistor element for information storage. To obtain good reliability and performances of the device, interface between PCMat and electrodes needs to be optimized.In this work, we study the adhesion between the electrode material and GeTe PCMat by a mechanical characterization (four-point bending). Our results show that a thin titanium interfacial layer drastically enhances the adhesion energy. Using X-Ray Diffraction and Secondary Ion Mass Spectroscopy, strong chemical interactions between titanium and tellurium is evidenced. In particular, after a 400 °C anneal, Ti3Te4 formation is observed. This chemical affinity probably explains the improvement of adhesion between the electrode and GeTe.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 88, Issue 5, May 2011, Pages 817–821
نویسندگان
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