کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
544759 871782 2011 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Replication of 3D-microstructures with undercuts by UV-moulding
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Replication of 3D-microstructures with undercuts by UV-moulding
چکیده انگلیسی

The replication of microstructures with undercuts by UV-moulding was studied. The pattern transfer from a silicon master into hard acrylate formulations results in defects by sheering away the undercut sections of the replica. By means of the admixture of high elastic acrylates to the formulation the replication of 3D-microstructures with larger undercuts could be achieved. The differences in the replication defect formation for imprinting and UV-moulding are due to the differences in the elasticity of master and replica and the dissimilar distribution of the forces at demoulding.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 88, Issue 1, January 2011, Pages 60–63
نویسندگان
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