On the effects of hydrogenation of thin film polycrystalline silicon: A key factor to improve heterojunction solar cells

The passivation of thin film polycrystalline silicon solar cells is investigated using direct and remote hydrogen plasma. The relationship between the hydrogen induced defects and the recombination within the space charge region of the heterojunction solar cells is established. Simultaneous enhancement of the voltage and the current and 8.54% efficiency are achieved with synergistic plasma texturing.