Single-crystal atomic layer deposited Y2O3 on GaAs(0 0 1) - growth, structural, and electrical characterization

Single-crystal atomic layer deposited Y2O3 on GaAs(0 0 1) - growth, structural, and electrical characterization

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 147, 1 November 2015, Pages 310-313

S.Y. Wu, K.H. Chen, Y.H. Lin, C.K. Cheng, C.H. Hsu, J. Kwo, M. Hong,