The effects of supercritical CO2 formulations on the removal of high-dose ion-implanted photoresists

- 3 wt.% EH-3 and TMN-3 are chosen to form scCO2 microemulsions.
- 2 vol.% DMSO and IPA can enhance HDI PR efficiency by 75.5% and 64.2%.
- DMSO and EH-3 show a positive synergistic effect on the stripping efficiency.
- scCO2 density tuned by temperature and pressure affects HDI PR stripping behavior.
- 100% Removal efficiency is achieved at 60 °C and 25 MPa for 20 min.