کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
6944119 1450373 2013 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
SAW sensor based on highly sensitive nanoporous palladium thin film for hydrogen detection
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
SAW sensor based on highly sensitive nanoporous palladium thin film for hydrogen detection
چکیده انگلیسی
► SAWS with Pd nanoporous sensing material were investigated for H2 detection at RT. ► The sensitivity and LOD at RT was 0.31 Hz/ppm and 48 ppm respectively. ► Sensor response is proportional to the concentration and is reversible. ► For a concentration of 0.2-0.8H2 in air the response times were 15-44 s. ► The sensors performance was improved using a nanoporous Pd layer deposited by PLD.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 108, August 2013, Pages 218-221
نویسندگان
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