The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM

- We examine degradation of Ta2O5 high-k oxide.
- Effect of recrystallization on the electrical properties of Ta2O5 is investigated.
- Poly-crystalline Ta2O5 shows different conductive domains.
- Conductive atomic force microscopy (C-AFM) and TEM are used for characterization.