کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7117654 | 1461365 | 2018 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Codoping effects of the Zn acceptor on the structural characteristics and electrical properties of the Ge donor-doped GaN thin films and its hetero-junction diodes all made by reactive sputtering
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Zn acceptor/Ge donor (Zn/Ge)-codoped GaN films with different Zn contents have been deposited on Si substrates at 300â¯Â°C and at 90-150â¯W by RF reactive sputtering technique with cermet targets at the composition atomic ratios of Zn:Ge:(Ga+GaN) at x:0.03:(0.97-x) with xâ¯=â¯0, 0.03, 0.06, and 0.09 and Ga:GaNâ¯=â¯3:7. The films made with such targets were presented in an abbreviated symbol of Zn-x-GeGaN at xâ¯=â¯0, 0.03, 0.06, and 0.09. The morphology, structure, electrical properties, optical property, and hetero-junction diode devices involved in the Zn-x-GeGaN films were thoroughly investigated. The systematic Zn increment into the n-type Zn-0-GeGaN through property evaluation provides the supporting information in studying solid solutioning. Zn-x-GeGaN films converted into p-type semiconductor at xâ¯=â¯0.06 and 0.09. The values of bandgap were in the range of 2.87-3.17â¯eV with the lower value for the higher Zn content in Zn-x-GeGaN films. The higher RF power led to the faster growth, highly deficient in nitrogen, and a higher Zn atom ratio in the deposited film. The 120W-deposited Zn-0.06-GeGaN film had hole concentration of 7.21â¯Ãâ¯1016 cmâ3, hole mobility of 39.1â¯cm2 Vâ1 sâ1, and the electrical conductivity of 0.45â¯S/cm.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Science in Semiconductor Processing - Volume 82, 1 August 2018, Pages 126-134
Journal: Materials Science in Semiconductor Processing - Volume 82, 1 August 2018, Pages 126-134
نویسندگان
Cao Phuong Thao, Dong-Hau Kuo, Der-Jun Jan,