Effects of processing force on performance of nano-resonators produced by magnetron sputtering deposition

In this study, effects of the processing force on the surface roughness and vibration characteristics of micro/nano-resonators produced by magnetron sputtering deposition are revealed. The processing force is defined as the ratio of the sputtering power-to-the substrate's traveling velocity. By comparing the substrate's traveling velocity to the deposition rate of the sputtered particles, relations are derived for the thickness and surface roughness evolutions with the processing force. The coefficients of these relations are experimentally determined for mechanical resonators made of FeNiCr alloy. Then, the variations of the natural frequencies of these resonators with the processing force of magnetron sputtering and the deposition rate of the sputtered particles are depicted. It is demonstrated that special considerations should be given for the effects of the processing conditions and surface roughness when designing mechanical resonators produced by magnetron sputtering.