کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7938463 | 1513181 | 2018 | 14 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Some new insights into the impact of annealing on single stacking faults in 4H-SiC
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
مواد الکترونیکی، نوری و مغناطیسی
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چکیده انگلیسی
The impact of annealing in the 350-500â¯Â°C temperature range on the stacking faults, generated by electron beam irradiation of 4H-SiC crystals, have been studied. We have demonstrated that the partial dislocations driving the stacking faults expansion are also mobile under annealing and lead to shrinking of stacking faults. Gliding of 90° partial dislocations with both C- and Si-core is detected after annealing. It is observed that SSFs introduced from indentation by annealing have not pronounced crystallographic orientation that can prevent their expansion under subsequent electron irradiation. An anomalous excess carriers transport along the stacking faults at distances of 10 and 50â¯Î¼m in highly- and low-doped 4H-SiC is detected.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Superlattices and Microstructures - Volume 120, August 2018, Pages 7-14
Journal: Superlattices and Microstructures - Volume 120, August 2018, Pages 7-14
نویسندگان
E.B. Yakimov, E.E. Yakimov, V.I. Orlov, D. Gogova,