Imaging and spectroscopy of secondary electrons from AlN and β-SiAlON ceramics using fountain detector

Figures show the comparison of conventional SE image (a), FD images of 0 and 20 V (b, c) and its processed images (d, e, f). These observations suggest that the bright contrast of insulating materials is not an intrinsic character of insulators but the SE3 contribution, which was generated by high energy SEs scattered at the specimen chamber and objective lens.(a) Conventional SE image, FD images at bias voltage (b) 0, (c) 20V, and subtraction images of (d) 10-0 (e) 40-30 (f) 50-40 V.172