Slip system analysis and X-ray topographic study on β-Ga2O3

Slip system and possible dislocation characters in a wide-bandgap semiconductor β-Ga2O3 have been studied. The space lattice is monoclinic in which oxygen sublattice has a distorted cubic close-packed structure consisting of {2¯01}, {101}, {3¯10} and {3¯1¯0} planes. The shortest and second shortest translation vectors on each plane are possible Burgers vectors of a dislocation. Dislocations in a (2¯01)-oriented wafer were observed by means of synchrotron radiation X-ray topography with reflection geometry. The observed dislocations were analyzed in relation to the slip system. Using the g→·b→ invisibility criterion and the obtained slip system, Burgers vectors of some typical dislocations were identified.