Optical properties of photoresist in the terahertz range

To meet the urgent demand for terahertz band materials with the development of terahertz devices, we have identified the refractive index, absorption coefficient, transmittance and dielectric constants of photoresist from 0.25 to 1.0 THz for it is no any reactions in the THz band. The absorption coefficient is less than 3 m−1. The refractive index of the unexposed sample and exposed sample range from 1.71-1.82 and 1.68-1.76, with the transmittance ranges of 81-92% and 77-89.5%, respectively. The results suggested that photoresist could be good candidate materials for terahertz photon devices. The new applications of photoresist were opened up and the THz material databases were enriched by this work.