Pull-in instability of paddle-type and double-sided NEMS sensors under the accelerating force

Paddle-type and double-sided nanostructures are potential for use as accelerometers in flying vehicles and aerospace applications. Herein the pull-in instability of the cantilever paddle-type and double-sided sensors in the Casimir regime are investigated under the acceleration. The D׳Alembert principle is employed to transform the accelerating system into an equivalent static system by incorporating the accelerating force. Based on the couple stress theory (CST), the size-dependent constitutive equations of the sensors are derived. The governing nonlinear equations are solved by two approaches, i.e. modified variational iteration method and finite difference method. The influences of the Casimir force, geometrical parameters, acceleration and the size phenomenon on the instability performance have been demonstrated. The obtained results are beneficial to design and fabricate paddle-type and double-sided accelerometers.