Thermodynamic evaluation of nucleation as a method for selection of aluminium nitride modifications

The Volmer and Wulf models have been used to study the process of nucleation of aluminium nitride modifications. The sizes of the critical nuclei of aluminium nitride modifications have been determined depending on the degree of supersaturation. It has been demonstrated that by varying the technological parameters of chemical vapour deposition it is possible to determine the conditions for selection of AlN modifications.