کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8150802 | 1524425 | 2014 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
MOCVD-grown compressively strained C-doped InxGa1âxAs1âySby with high-In/Sb content for very low turn-on-voltage InP-based DHBTs
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We investigated metalorganic chemical vapor deposition of C-doped high-In-and-Sb-content compressively strained InxGa1âxAs1âySby and examined InP-based heterojunction bipolar transistors (HBTs) with low base-emitter turn-on voltage. By lowering the growth temperature to 530 °C, the etching effect of CBr4 is suppressed, which is consistent with the results of thermodynamic calculations. We obtained high hole concentration of mid-1019 cmâ3 with the In content of over 0.20. The base-emitter voltage (VBE) at collector current density (JC) of 10 nA/μm2 of large-area HBTs with the high-In-and-Sb-content compressively strained InxGa1âxAs1âySby base is lower than those of the HBTs with a tensile strained InxGa1âxAs1âySby or GaAs1âySby base, owing to the reduction of the band gap of the base layer. We fabricated InP/In0.20Ga0.80As0.55Sb0.45/InP HBTs with a 0.25-μm-wide emitter and obtained the VBE of 0.66 V at JC of 1 mA/μm2. At JC=13 mA/μm2, the device exhibits peak current-gain cut-off frequency of over 400 GHz, which is comparable to the value for GaAs1âySby-base HBTs with the same base and collector thicknesses.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 404, 15 October 2014, Pages 172-176
Journal: Journal of Crystal Growth - Volume 404, 15 October 2014, Pages 172-176
نویسندگان
Takuya Hoshi, Norihide Kashio, Hiroki Sugiyama, Haruki Yokoyama, Kenji Kurishima, Minoru Ida, Hideaki Matsuzaki, Masaki Kohtoku, Hideki Gotoh,