On mechanisms governing AlN and AlGaN growth rate and composition in large substrate size planetary MOVPE reactors

We report about a MOVPE parameter study carried out on a Planetary Reactor to determine factors that govern the incorporation efficiency of aluminum and gallium into AlxGa1−xN, hence its solid composition x and growth rate. Parameter variations include pressure, flow rate, wafer and ceiling temperature, V-III-ratio, and Al/(Al+Ga) inlet ratio. The target composition is 0.15