An array of Au nanoparticles on the nanopatterned Si(1Â 0Â 0)

1-D arrays of Au nanoparticles (AuNPs) were fabricated on a silicon wafer. The silicon oxide patterns were prepared on the OTS-derivatized Si(1 1 0) by AFM anodic oxidation. After modifying the patterned area with APTES (aminopropyltriethoxylsilane) and MPTMS ((3-mercaptopropyl)trimethoxysilane) via a selective self-assembly technique, colloidal AuNPs were immobilized on the patterned regions of the silicon substrate. This assembled substrate was immersed in a growth solution for additional growth of the AuNPs. As a result, continuously linked 1-D arrays of nanoparticles are formed without any significant increase in line width.