Multi-layered resist process in nanoimprint lithography for high aspect ratio pattern Fulltext Access 4 Pages 2006
Assembly of an aperture plate system for projection mask-less lithography Fulltext Access 4 Pages 2006
Lossless high-speed data compression for optical interconnects as used in maskless lithography systems Fulltext Access 4 Pages 2006
Projection mask-less lithography (PML2): First results from the multi beam blanking demonstrator Fulltext Access 4 Pages 2006
Rapid and three-dimensional nanoimprint template fabrication technology using focused ion beam lithography Fulltext Access 4 Pages 2006
Polyimide nanostructures fabricated by nanoimprint lithography and its applications Fulltext Access 4 Pages 2006
Pattern replication of 100 nm to millimeter-scale features by thermal nanoimprint lithography Fulltext Access 4 Pages 2006
Directly patterning metal films by nanoimprint lithography with low-temperature and low-pressure Fulltext Access 4 Pages 2006
Novel hybrid mask mold for combined nanoimprint and photolithography technique Fulltext Access 4 Pages 2006
Fabrication of multi-layered nano-channels by reversal imprint lithography Fulltext Access 4 Pages 2006
Minimization of residual layer thickness by using the optimized dispensing method in S-FILTM process Fulltext Access 4 Pages 2006
Direct pattern transfer for sub-45 nm features using nanoimprint lithography Fulltext Access 4 Pages 2006
Patterning nanoscale features using the 2-step NERIME nanolithography process Fulltext Access 4 Pages 2006
Surface morphologies in polymers by irradiation with argon ions and consecutive swelling Fulltext Access 4 Pages 2006
Axicon lens on optical fiber forming optical tweezers, made by focused ion beam milling Fulltext Access 4 Pages 2006
Fast soft recovery thyristors with axial lifetime profile fabricated using iridium diffusion Fulltext Access 4 Pages 2006
Photoluminescence study of type-II GaAs quantum well wires grown on nano-faced (3 1 1)A surface: Quasi-1D exciton observation? Fulltext Access 4 Pages 2006
Morphological evolution and lateral ordering of uniform SiGe/Si(0 0 1) islands Fulltext Access 4 Pages 2006
Dielectric enhancement in interface-modified BaTiO3/SrTiO3 multilayered films prepared by pulsed laser deposition Fulltext Access 4 Pages 2006
Extraction of the floating-gate capacitive couplings for drain turn-on estimation in discrete-trap memories Fulltext Access 4 Pages 2006
Suppression of carbon depletion from carbon-doped low-k dielectric layers during fluorocarbon based plasma etching Fulltext Access 4 Pages 2006
Improved electrical and reliability performance of 65 nm interconnects with new barrier integration schemes Fulltext Access 4 Pages 2006
Characterization of post-copper CMP surface with scanning probe microscopy: Part II: Surface potential measurements with scanning Kelvin probe force microscopy Fulltext Access 4 Pages 2006
Possibility to form an ultrahigh packed fine pit and dot arrays for future storage using EB writing Fulltext Access 4 Pages 2006
Redistribution of arsenic during the reaction of nickel thin films with silicon at relatively high temperature: Role of agglomeration Fulltext Access 4 Pages 2006
Laser trimming of amorphous Ta42Si13N45 thin films with ultrashort pulses Fulltext Access 4 Pages 2006
Decreasing step coverage of self-ionized plasma sputtered copper seed layer with target lifetime Fulltext Access 4 Pages 2006
Effect of frictional force vector on delamination in Cu/low-k integration Fulltext Access 4 Pages 2006
Removal of etching/ashing residues and ashing/wet-clean damage in porous silica low-k films Fulltext Access 4 Pages 2006
Effect of moisture adsorption on the properties of porous-silica ultralow-k films Fulltext Access 4 Pages 2006
The quest of porous ELK materials for high performance logic technologies Fulltext Access 4 Pages 2006
Characterization of transient currents in HfO2 capacitors in the short timescale Fulltext Access 4 Pages 2006
Unusual defects in silicon carbide thin films grown by multiple or interrupted growth technique Fulltext Access 4 Pages 2006
Analysis of minority carrier diffusion length in SiC toward high quality epitaxial growth Fulltext Access 4 Pages 2006
Unterminated 4H-SiC Schottky barrier diodes with novel HfNxBy electrodes Fulltext Access 4 Pages 2006
In situ etch treatment of bulk surface for epitaxial layer growth optimization Fulltext Access 4 Pages 2006
Analysis of bulk and surface components of leakage current in 4H-SiC PiN MESA diodes Fulltext Access 4 Pages 2006
Investigation of 4H-SiC MOS capacitors annealed in diluted N2O at different temperatures Fulltext Access 4 Pages 2006
Investigations on high temperature polyimide potentialities for silicon carbide power device passivation Fulltext Access 4 Pages 2006
Low-temperature growth of polycrystalline SiC by catalytic CVD from monomethylsilane Fulltext Access 4 Pages 2006
Employing a detailed compositional analysis to develop a low defect Mo/Si deposition tool and process for EUVL mask blanks Fulltext Access 4 Pages 2006
Optimisation of HSQ e-beam lithography for the patterning of FinFET transistors Fulltext Access 4 Pages 2006
Three dimensional HSQ structures formed using multiple low energy electron beam lithography Fulltext Access 4 Pages 2006
Flying phase mask for the printing of long submicron-period stitchingless gratings Fulltext Access 4 Pages 2006
Performance of gas jet type Z-pinch plasma light source for EUV lithography Fulltext Access 4 Pages 2006
A new approach for actinic defect inspection of EUVL multilayer mask blanks: Standing wave photoemission electron microscopy Fulltext Access 4 Pages 2006
The role of ambient hydrocarbon species to reduce oxidation in Ru capping layers for EUVL optics mirrors Fulltext Access 4 Pages 2006
Resonantly enhanced addressing of a spatial light modulator micro-mirror array Fulltext Access 4 Pages 2006
A study of 193-nm immersion lithography using novel high refractive index fluids Fulltext Access 4 Pages 2006
Characterization of stray light of ArF lithographic tools: Modeling of power spectral density of an optical pupil Fulltext Access 4 Pages 2006
Scaling potential of pin-type 3-D SBT ferroelectric capacitors integrated in 0.18 μm CMOS technology Fulltext Access 5 Pages 2006
Auger electron spectroscopy study of reactive ion etched silicon carbide Fulltext Access 5 Pages 2006
Device processing and characterisation of high temperature silicon carbide Schottky diodes Fulltext Access 5 Pages 2006
Optical properties of cubic SiC grown on Si substrate by chemical vapor deposition Fulltext Access 5 Pages 2006