Gate voltage and oxide thickness dependence of progressive wear-out of ultra-thin gate oxides Fulltext Access 5 Pages 2006
Localization and physical analysis of a complex SRAM failure in 90nm technology Fulltext Access 5 Pages 2006
Numerical evaluation of miniaturized resistive probe for quantitative thermal near-field microscopy of thermal conductivity Fulltext Access 5 Pages 2006
Time gating imaging through thick silicon substrate: a new step towards backside characterisation Fulltext Access 5 Pages 2006
On the profile of temperature dependent series resistance in Al/Si3N4/p-Si (MIS) Schottky diodes Fulltext Access 5 Pages 2006
Fabrication of various curved relief structures through concave surface forming and soft replica molding Fulltext Access 5 Pages 2006
Diffusion barrier performance of W/Ta–W–N double layers for Cu metallization Fulltext Access 5 Pages 2006
Fabrication of multi-dimensional colloid crystals on raised surfaces via reversal nanoimprint lithography Fulltext Access 5 Pages 2006
Analysis of HSG-7000 silsesquioxane-based low-k dielectric hot plate curing using Raman spectroscopy Fulltext Access 5 Pages 2006
Effect of the spatial distribution of SiO2 thickness on the switching behavior of bistable MOS tunnel structures Fulltext Access 5 Pages 2006
Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity Fulltext Access 5 Pages 2006
Fabrication of nano-sized resist patterns on flexible plastic film using thermal curing nano-imprint lithography Fulltext Access 5 Pages 2006
Inkjet printed silver source/drain electrodes for low-cost polymer thin film transistors Fulltext Access 5 Pages 2006
Study of ultrathin vanadium nitride as diffusion barrier for copper interconnect Fulltext Access 5 Pages 2006
Thermal analysis for step and flash imprint lithography during UV curing process Fulltext Access 5 Pages 2006
Frequency dependent capacitance and conductance–voltage characteristics of Al/Si3N4/p-Si(1 0 0) MIS diodes Fulltext Access 5 Pages 2006
Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding Fulltext Access 5 Pages 2006
Vertically aligned GaN nanotubes – Fabrication and current image analysis Fulltext Access 5 Pages 2006
Template synthesis of carbon nanotubes from porous alumina matrix on silicon Fulltext Access 5 Pages 2006
Temperature effects on DC and small signal RF performance of AlGaAs/GaAs HEMTs Fulltext Access 5 Pages 2006
Effect of reverse substrate bias on ultra-thin gate oxide n-MOSFET degradation under different stress modes Fulltext Access 5 Pages 2006
On solution schemes for time-independent thermomechanical analysis for structures containing polymeric materials Fulltext Access 5 Pages 2006
Development of bulk nanostructured copper with superior hardness for use as an interconnect material in electronic packaging Fulltext Access 5 Pages 2006
Determination of thermal resistance using Gummel measurement for InGaP/GaAs HBTs Fulltext Access 5 Pages 2006
Effect of annealing on the properties of low-k nanoporous SiO2 films prepared by sol–gel method with catalyst HF Fulltext Access 5 Pages 2006
Influence of TCE concentration in thermal oxidation on reliability of SiC MOS capacitors under Fowler–Nordheim electron injection Fulltext Access 5 Pages 2006
Kelvin probe force microscopy – An appropriate tool for the electrical characterisation of LED heterostructures Fulltext Access 5 Pages 2006
Impact on the back gate degradation in partially depleted SOI n-MOSFETs by 2-MeV electron irradiation Fulltext Access 5 Pages 2006
Charging-Effects in RF capacitive switches influence of insulating layers composition Fulltext Access 5 Pages 2006
Novel ESD strategy for high voltage non-volatile programming pin application Fulltext Access 5 Pages 2006
Experimental investigation on the impact of stress free temperature on the electromigration performance of copper dual damascene submicron interconnect Fulltext Access 5 Pages 2006
The effect of Cu diffusion on the TDDB behavior in a low-k interlevel dielectrics Fulltext Access 5 Pages 2006
CMP characteristics and optical property of ITO thin film by using silica slurry with a variety of process parameters Fulltext Access 5 Pages 2006
Chip-to-chip interconnections based on the wireless capacitive coupling for 3D integration Fulltext Access 5 Pages 2006
Wide band frequency and in situ characterisation of high permittivity insulators (High-K) for H.F. integrated passives Fulltext Access 5 Pages 2006
Correlation between trench depth and TDDB thermal activation energy in single damascene Cu/SiOC:H Fulltext Access 5 Pages 2006
Phase effects and short gate length device implementation of Ni fully silicided (FUSI) gates Fulltext Access 5 Pages 2006
Different approaches to integrate patterned buried CoSi2 layers in SOI substrates Fulltext Access 5 Pages 2006
Density functional study of the stability and electronic properties of TaxNy compounds used as copper diffusion barriers Fulltext Access 5 Pages 2006
Dependence of CMP-induced delamination on number of low-k dielectric films stacked Fulltext Access 5 Pages 2006
Characterization of imprinting polymeric temperature variation with fluorescent Rhodamine B molecule Fulltext Access 5 Pages 2006
Multibeam electron source for nanofabrication using electron beam induced deposition Fulltext Access 5 Pages 2006
Nanoscale imaging with a portable field emission scanning electron microscope Fulltext Access 5 Pages 2006
Transitioning of direct e-beam write technology from research and development into production flow Fulltext Access 5 Pages 2006
Evaluation of air gap structures produced by wet etch of sacrificial dielectrics: Extraction of keff for different technology nodes and film permittivity Fulltext Access 5 Pages 2006
Capacitance non-linearity study in Al2O3 MIM capacitors using an ionic polarization model Fulltext Access 5 Pages 2006
Electrical properties and thermal stability of MOCVD grown Ru gate electrodes for advanced CMOS technology Fulltext Access 5 Pages 2006
Material and electrical characterization of TMS-based silicidation of the Cu-dielectric barrier interface for electromigration improvement of 65 nm interconnects Fulltext Access 5 Pages 2006
Reliability issues in Cu/low-k structures regarding the initiation of stress-voiding or crack failure Fulltext Access 5 Pages 2006
Effects of electromigration on microstructural evolution of eutectic SnPb flip chip solder bumps Fulltext Access 5 Pages 2006
Influence of mass density and mechanical properties on the surface acoustic wave velocity dispersion Fulltext Access 5 Pages 2006
Properties of 50 nm electroless films Ag–W–oxygen before and after low temperature, low activation energy resistivity decay Fulltext Access 5 Pages 2006
Measuring the Young’s modulus of ultralow-k materials with the non destructive picosecond ultrasonic method Fulltext Access 5 Pages 2006
High frequencies characterization of Cu-MIM capacitors in parallel configuration for advanced integrated circuits Fulltext Access 5 Pages 2006
Study of the post-etch cleaning compatibility with dense and porous ULK materials – characterization of the process impact Fulltext Access 5 Pages 2006
Characterization of the impact of plasma treatments and wet cleaning on a porous low k material Fulltext Access 5 Pages 2006
Chemical etching solutions for air gap formation using a sacrificial oxide/polymer approach Fulltext Access 5 Pages 2006
Impact of dummies on interconnects network HF propagation performances for the 65 nm node Fulltext Access 5 Pages 2006
Quantification of processing damage in porous low dielectric constant films Fulltext Access 5 Pages 2006
Tuning nickel silicide properties using a lamp based RTA, a heat conduction based RTA or a furnace anneal Fulltext Access 5 Pages 2006
Growth of Ru/RuO2 layers with atomic vapor deposition on plain wafers and into trench structures Fulltext Access 5 Pages 2006
Electrical properties of epitaxial NiSi2/Si contacts with extremely flat interface formed in Ni/Ti/Si(0 0 1) system Fulltext Access 5 Pages 2006
In situ study of the growth kinetics and interfacial roughness during the first stages of nickel–silicide formation Fulltext Access 5 Pages 2006
Microstructure and material properties of electroless CoWP films obtained from sulfamate solutions Fulltext Access 5 Pages 2006