Keywords: ابعاد انتقادی; Optical lithography; Critical dimension; Stray light; Kirk flare model; PSFF function model;
مقالات ISI ابعاد انتقادی (ترجمه نشده)
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Keywords: ابعاد انتقادی; Automation stage; Atomic force microscopy; Critical dimension; Tip wearing; IVPS100; TGX1;
Keywords: ابعاد انتقادی; 35J62; 35J70; 34B15; 35B35; Quasilinear elliptic equation; p-Laplacian; k-Hessian; MEMS capacitor; Critical dimension; Regularity; Mountain Pass solutions;
Keywords: ابعاد انتقادی; Atomic force microscope; Dual probe; Caliper; Critical dimension; Sidewall; Micro and nanostructures;
Keywords: ابعاد انتقادی; Critical dimension; Yield enhancement; Tool affinity; Tool dispatching; Feed-forward control; Run-to-run (R2R); Manufacturing intelligence
Keywords: ابعاد انتقادی; critical dimension; glass forming alloy; artificial neural network; metallic glasses;
Keywords: ابعاد انتقادی; Spectroscopic; Ellipsometry; Critical dimension; Dielectric function; Optical properties;
Use of model-based library in critical dimension measurement by CD-SEM
Keywords: ابعاد انتقادی; Model-based library; Critical dimension; Secondary electron; CD-SEM; Monte Carlo simulation;
A Kalman filter-based R2R control system with parallel stochastic disturbance models for semiconductor manufacturing processes
Keywords: ابعاد انتقادی; ARIMA; auto-regressive integrated moving average; B-; bias varying; CD; critical dimension; dEWMA; double EWMA; EWMA; exponentially weighted moving average; FV; feedforward variable; G-; gain varying; IAR; integrated auto-regressive; IMA; integrated movin
Dynamic switching characteristic dependence on sidewall angle for phase change memory
Keywords: ابعاد انتقادی; Phase change memory; Critical dimension; Sidewall angle; Thermo-electric simulation
Leakage reduction through optimization of regular layout parameters
Keywords: ابعاد انتقادی; Regular layout optimization; Restrictive design rules; Non-rectangular gate; Critical dimension; Leakage; Process variation
On positive solutions of quasi-linear elliptic equations involving critical Sobolev growth
Keywords: ابعاد انتقادی; Constrained minimization; Critical dimension; Critical Sobolev growth; m-Laplacian; Picone identity; Pohozaev identity;
Parameter optimization of sub-35 nm contact-hole fabrication using particle swarm optimization approach
Keywords: ابعاد انتقادی; Critical dimension; Back-propagation neural network; Particle swarm optimization (PSO)
Critical dimension and real-time temperature control for warped wafers
Keywords: ابعاد انتقادی; Lithography; Critical dimension; Wafer warpage; Real-time control
CD and IP accuracy in electron beam character projection technology
Keywords: ابعاد انتقادی; Critical dimension; Image placement; Electron beam; Lithography; Variable shaped beam; Character projection
Limit theorems for occupation time fluctuations of branching systems II: Critical and large dimensions
Keywords: ابعاد انتقادی; 60F17; 60J80; secondary 60G15; 60G20Functional limit theorem; Occupation time fluctuation; Branching particle system; Generalized Wiener process; Critical dimension