کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10669693 1008781 2014 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Dielectric function of zinc oxide thin films in a broad spectral range
ترجمه فارسی عنوان
کارکرد دی الکتریک فیلمهای نازک روی یک طیف وسیع طیف
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
چکیده انگلیسی
Complex dielectric function of very thin ZnO films prepared with different oxygen concentration during deposition has been studied in 220-1700 nm and 2-25 μm spectral range. Variation of oxygen concentration in deposition chamber is intended to stabilize film properties by compensating oxygen deficiency. The films obtained by magnetron sputtering with thicknesses below 100 nm and optical axis perpendicular to sample surface were measured in standard ellipsometry configurations using rotating compensator ellipsometers. Dielectric function of the films obtained by fitting the experimental data using oscillator model exhibits narrowing and band edge oscillator center energy shifts from 3.178 to 3.355 eV for samples prepared with 0.5% and 1-2% oxygen, respectively. Results suggest ~ 2% as the optimal oxygen concentration for preparation of optically stable films. Infrared dielectric function of the film prepared with 2% oxygen is also obtained.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 571, Part 3, 28 November 2014, Pages 593-596
نویسندگان
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