Realization of superhard chromium nitride-based films: A superlattice nanocrystalline-Cr2N/amorphous-WC film

► Nanocrystal-Cr2N/amorphous-WC films prepared by a hybrid physical vapor deposition. ► Structures by transmission electron microscopy and X-ray photoelectron spectroscopy. ► Hardness, wear behavior and scratch strength of the film evaluated. ► The film exhibited superhardness and meanwhile strong enough fracture toughness.