کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10669823 1008842 2012 19 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Recollections of fifty years with sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
Recollections of fifty years with sputtering
چکیده انگلیسی
The paper is an attempt to trace milestones in the understanding of sputtering by ion bombardment. The field developed rapidly between 1955 and the end of the 1980s, but several important aspects are still under active investigation today. The focus here is on the evolution of the present understanding of the process of sputter emission. The presentation is based primarily on physical arguments, supported by results from theory referred to in the text. Many research groups have contributed to this field. Doing justice to them all appears close to impossible within the given frame.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Thin Solid Films - Volume 520, Issue 19, 31 July 2012, Pages 6031-6049
نویسندگان
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