Effect of TiO2 nanopatterns on the performance of hydrogenated amorphous silicon thin-film solar cells

► We investigated the height effect of TiO2 nanopatterns on the a-Si:H solar cells. ► Light scattering and anti-reflection were introduced by TiO2 nanopatterns. ► a-Si:H Solar cells with the 100 nm-high TiO2 nanopatterns showed highest efficiency.