Atomic force microscopy and X-ray photoelectron spectroscopy evaluation of adhesion and nanostructure of thin Cr films

► Cr thin films were deposited on glass using different vacuum deposition methods. ► Surface morphological, chemical, adhesive and structural properties were studied. ► The e-beam deposited Cr thin films consisted of isolated surface mounds. ► In RF magnetron sputtered samples, surface mounds combined to form larger islands. ► Variations in surface adhesive force were due to nanostructural differences.